SUBSTRATE INSPECTION METHOD, SUBSTRATE INSPECTION SYSTEM AND STORAGE MEDIUM

摘要

A substrate inspection method capable of accurately inspecting a substrate is provided. A jig having reference points represented by known coordinates in a three-dimensional world coordinate system is photographed by a camera and coordinates of the reference points in a pixel image coordinate system defined by pixels of an image forming device is determined. The coordinates in the pixel image coordinate system are transformed into those in a camera coordinate system set on the camera, and world-camera coordinate system transformation parameters are calculated. Image data in the pixel image coordinate system obtained by photographing a substrate to be inspected is transformed into image data in a world coordinate system for inspection. The accurate inspection of the substrate to be inspected can be achieved because distortion in the image of the substrate to be inspected in the world coordinate system attributable to the position and attitude of the camera is reduced.