Resonator i.e. micromechanical rotation rate sensor, for use in e.g. electronic stability program-system of vehicle, has springs comprising two spring rigidity during movement of masses with minimum and maximum amplitudes, respectively

摘要

The resonator has oscillating masses (30) connected with one another, and springs (32, 44, 48) connecting the masses with a base substrate (46) that is connected with a drive frame (36). Actuator electrode fingers (38) and stator electrode fingers (40) are provided for pivoting movement of the masses with amplitude from an amplitude range of minimum amplitude and maximum amplitude. The springs have two spring rigidity during the pivoting movement of the masses with the minimum and maximum amplitudes, respectively, where one of the rigidity is larger than the other rigidity. Independent claims are also included for the following: (1) a method for manufacturing a resonator (2) a method for setting a natural frequency of a resonator.