| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing piezoelectric actuator, capable of preventing cracks from occurring in a piezoelectric layer, when polarizing the piezoelectric layer. <P>SOLUTION: In the piezoelectric actuator 32, when a first active part R1 formed between an upper electrode 45 and an intermediate electrode 44 of an upper piezoelectric layer 42, and a second active part R2 which does not face the intermediate electrode 44 among a part formed between the upper electrode 45 and a lower electrode 43 of a lower piezoelectric layer 41 and the upper piezoelectric layer 42 are polarized; and first, the lower electrode 43 is at lower electrical potential than that of the upper electrode 45 and the intermediate electrode 44 is at the electrical potential between that of the upper electrode 45 and that of the lower electrode 43, thereby the second active part R2 is polarized downward. Next, the upper electrode 45 and the lower electrode 43 are at same electric potential, the intermediate electrode 44 is at higher potential than that of the upper electrode 45 and the lower electrode 43, and the first active part R1 is polarized upward. <P>COPYRIGHT: (C)2010,JPO&INPIT |
