| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a cleaning device in which a cleaning liquid can be properly circulated in its cleaning vessel. Ž<P>SOLUTION: The cleaning device 1 includes the cleaning vessel 3 immersing materials to be cleaned 2 and a member 20 jetting a cleaning liquid which jets the cleaning liquid toward the material to be cleaned 2. The member 20 for jetting a cleaning liquid is attached to the side 3b of the cleaning vessel 3. In the cleaning device 1, generation of turbulence of the flow of the cleaning liquid in the cleaning vessel 3 caused by the member 20 for jetting a cleaning liquid is minimized and the cleaning liquid is properly circulated in the cleaning vessel 3. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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