| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and method of electron beam machining in which accuracy, reliability, etc., of alignment can be improved and in which reduction of manufacturing cost can be attained, and also to provide an apparatus and method of electron beam irradiation. SOLUTION: An electron beam welding apparatus 1 includes an electron gun 2, a focusing coil 4, and an alignment control means 3 comprising an alignment coil 31, a digital observation optical system 32, a digital image processing controller 33, and an information processor 34. With a target 10 irradiated with an electron beam in an upper focus state and a lower focus state and, on the basis of a correction value calculated from the difference of position coordinates of these irradiation images, the information processor 34 outputs an alignment control signal to the alignment coil 31. COPYRIGHT: (C)2010,JPO&INPIT
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