发明名称 COOLING DEVICE AND COOLING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a cooling device and a cooling method, capable of reducing manufacturing costs by simplifying a refrigerant circuit and of maintaining stable cooling capacity all the time. SOLUTION: The cooling device 20 includes: a water cooled condenser 22 arranged downstream of a compressor 21 for compressing a refrigerant and condensing a primary refrigerant from the compressor 21 by cooling water; an air cooled condenser 23 arranged in series downstream of the water cooled condenser 22 and condensing the primary refrigerant from the water cooled condenser 22 side by air; and an evaporator 25 arranged downstream of the air cooled condenser 23. A temperature switch 26 for detecting the temperature of the primary refrigerant is provided on the downstream side of the water cooled condenser 22 and on the upstream side of the air cooled condenser 23, and when the detection temperature by the temperature switch 26 exceeds predetermined temperature, the air cooled condenser 23 is actuated. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010127600(A) 申请公布日期 2010.06.10
申请号 JP20080306403 申请日期 2008.12.01
申请人 TOKYO ELECTRON LTD 发明人 HATTA MASATAKA
分类号 F25B6/04;F25B49/02;H01L21/66 主分类号 F25B6/04
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