<p>Provided is a charged particle beam device which applies a primary charged particle beam (3) to a sample (11) and acquires an energy distribution image of signal electrons (14) generated from the sample by using the phenomenon that the signal electrons (14) generated from the sample comes to a different position of a signal detector (16) of the position sensitive type according to the energy of the signal electrons (14). The device can distinguish and select a signal electron having a certain energy so as to obtain an image reflecting information inherent to the energy and acquire information relating to various characteristics of the sample.</p>
