PROBE CARD

摘要

A probe card provided to a probe device is equipped with a support plate for supporting a contact body and also with a circuit board provided on the upper surface side of the support plate.  A connecting member is provided on the upper surface of the circuit board, and the connecting member and the support plate are connected to each other by a connecting body.  Load adjusting members for maintaining constant a contact load between the contact body and an object to be tested is provided on the upper surface of the connecting member.  Elastic members for fixing the horizontal position of the support plate are arranged on the outer periphery of the connecting member.  Intermediate members for elastically and electrically connecting the circuit board and the support plate to each other are arranged between the circuit board and the support plate.