| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an edge detection apparatus which detects the edge position of an object to be detected with a high degree of accuracy regardless of the shape of the object to be detected, of which accuracy as a spatial filter is high, and which has a lot of flexibility in placement. <P>SOLUTION: The apparatus includes: a white light source 101 which sends white light including light having two or more wavelengths to a first optical path 109a; a chromatic aberration focusing lens 102 which forms two or more focuses on the optical axis towards a workpiece 1 (the object to be detected) for respective wavelengths contained in the white light sent to the first optical path 109a; an optical fiber 104 which brings the white light reflected by the workpiece 1 to a second optical path 109b different from the first optical path 109a; and a detector 103 which detects the intensity of the white light brought to the second optical path 109b by the optical fiber 104. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
