| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a piezoelectric vibration device in which adverse influence of the inclination of a piezoelectric vibration piece is eliminated. <P>SOLUTION: The piezoelectric vibration device includes: a rectangular piezoelectric vibration piece 2 provided with a vibration part 23 where excitation electrodes 211 and 221 are formed and a holding part 24 where connection electrodes 212 and 222 are formed; a base 3; and a lid bonded at the sealing part of the base, the holding part of the piezoelectric vibration piece being ultrasonically bonded to the loading part of the base by a conductive bump B. In the piezoelectric vibration device, the connection electrodes are formed at both ends of one end part of the piezoelectric vibration piece, electrical and mechanical bonding is performed in two holding part areas at both ends of one end part of the piezoelectric vibration piece onto the base through the conductive bump by the connection electrodes, and the piezoelectric vibration piece is held on one side on the base in a state wherein the conductive bump is in abutment in one holding part area where a base material of the piezoelectric vibration piece is exposed other than an area between the pair of connection electrodes and the pair of connection electrodes of the piezoelectric vibration piece. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
