发明名称 SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURING THE SAME
摘要 <p><P>PROBLEM TO BE SOLVED: To expand the size (surface area) of a capacitor even if a cell size is identical to that of a conventional one. <P>SOLUTION: The semiconductor device includes a plurality of bit lines b1 to b5 arranged in parallel with each other at a first wiring pitch, and a plurality of word lines w1 to w4 arranged in parallel with each other at a second wiring pitch expanded from the first wiring pitch while crossing the bit lines b1 to b5, and a plurality of capacitors. The center position 4 of each of the plurality of the capacitors is on the bit line, and is shifted from the intersection of the bit line and the word line by a prescribed dimension C in the arrangement direction of the word lines. <P>COPYRIGHT: (C)2010,JPO&INPIT</p>
申请公布号 JP2010129972(A) 申请公布日期 2010.06.10
申请号 JP20080306543 申请日期 2008.12.01
申请人 ELPIDA MEMORY INC 发明人 FUJIMOTO HIROYUKI
分类号 H01L21/8242;H01L27/10;H01L27/105;H01L27/108;H01L45/00;H01L49/00 主分类号 H01L21/8242
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