发明名称 FLOATING DEVICE AND FLUID JET BODY UNIT
摘要 PROBLEM TO BE SOLVED: To prevent contact of a floated body with a fluid jet body 30 by making fluid to abut on the lower surface of the floated body in the vicinity of the corner thereof when rotating the floated body and preventing deflection of the floated body. SOLUTION: This floating device 10 includes: a normal floating area 40 configured by arranging a plurality of normal fluid jet bodies 31 (30) in a predetermined order; a suction 60 sucked to the lower surface of the floated body in a floated state and arranged in a predetermined position within the normal floating area 40; and a rotating mechanism 70 rotating the suction 60 around a rotating shaft 72. A circle 50 passing the outside of the area, with at least a part thereof passing through the outside of the normal floating area 40 around the rotating shaft 72, is set. A fluid jet body 32 (30) on a circumference is arranged on the circumference of the circle 50 passing the outside of the area, located outside the normal floating area 40. The part of the floated body deviated from the normal floating area 40 in association with rotation is floated by the fluid ejected from the fluid jet body 32 (30) on the circumference. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010126357(A) 申请公布日期 2010.06.10
申请号 JP20080306743 申请日期 2008.12.01
申请人 MYOTOKU LTD;SUNTECH:KK 发明人 KOO AKIHIRO;SATO MINORU;MORI KENJI
分类号 B65G51/03;B65G49/06;H01L21/677 主分类号 B65G51/03
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