| 摘要 |
PURPOSE: A system for controlling a substrate treating apparatus and a method for managing the substrate data of the same are provided to improve the operating ratio of machines by managing the substrate data with identification numbers. CONSTITUTION: A machine controlling unit controls a substrate processing apparatus. An operator interface(400) is connected with the machine controlling unit through a network. The operator interface provides a user interface. A production managing system(100) integrates and manages the substrate processing apparatus. The production managing system includes a data base(110). A control system(10) gives identification numbers to a substrate which inserted into the substrate processing apparatus.
|
