| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure-sensitive adhesive chuck with which a substrate can be adhered at low cost by using adhesion rubber, and manufacturing cost can be saved, and which facilitates maintenance and repairs by using the adhesion rubber by a simple structure; and a substrate sticking device having the chuck. SOLUTION: The substrate sticking device includes: a first chamber equipped with a first surface plate for seating a first substrate; a second chamber separated from the first chamber and including a second surface plate for seating a second substrate stuck to the first substrate; an adhesion module provided at the first surface plate and having a plurality of pieces of the adhesion rubber for sticking the first substrate; and a hoist member for hoisting up and down at least one of the adhesion modules. COPYRIGHT: (C)2010,JPO&INPIT |
