| 摘要 |
PROBLEM TO BE SOLVED: To measure displacement of a plurality of measuring mirrors by a single position detector, in a three-dimensional shape measuring device. SOLUTION: Mutually parallel laser beams enter different positions on a plane E of polarization of a polarization beam splitter 204. One laser beam is split into two on the plane of polarization and enter a first measuring mirror 4 and a reference mirror 6. The other laser beam is split into two on the plane of polarization and enter a measuring mirror 5 and the reference mirror 6. A partial reflection mirror 214 through which a laser beam toward a measuring mirror 210 is transmitted, and by which a laser beam toward a measuring mirror 211 is reflected is arranged between the polarization beam splitter 204 and the measuring mirrors 210, 211. A relative position of the measuring mirrors 4, 5 to the reference mirror 6 is calculated from interference between laser beams reflected by the measuring mirrors 4, 5 and the reference mirror 6. COPYRIGHT: (C)2010,JPO&INPIT
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