| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a coater which well reproducibly controls the occurrence of a coating-thickness insufficient range of a coating liquid applied on the substrate and which is capable of reducing waste of materials and processes, and to provide a control method of a coater. Ž<P>SOLUTION: The coater 1 is provided with a die head 4 to apply the coating liquid 7 on the surface the substrate by continuously discharging the same from the delivery mouth 10, a pump 5 to supply the coating liquid to the die head, a reservoir detection parts 17, 18 to detect the completion of the discharge of the coating liquid to the gap between the delivery mouth 10 and the surface of the substrate 2, a property detection parts 13, 14 to detect the property of the coating liquid 7 to be supplied to the die head 4 and a control part 6. The control part 6 initiates the movement of the die head by comparing the detection signal from the reservoir detection parts with the threshold value established in advance and controls at least one of the liquid-feeding velocity of the coating liquid from the pump and the moement velocity of the die head so that the thickness of the coating liquid to be applied on the substrate is constantly kept in accordance with the detection signal inputted from the property detection parts. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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