摘要 |
<p>In a method of manufacturing an ink jet print head (10) that comprises a number of aligned modules (20), an alignment mark (32) is formed on a first and a second adjacent module (20), wherein the alignment mark (32) is positioned on a boundary (30) between the first and the second adjacent module (20) along which the wafer (26) is to be separated. In a separating step the wafer (26) is separated into separate modules (20) such that the alignment mark (32) is divided over said first and second adjacent module (20). At least one of said first and second module (20) is aligned by reference to the divided alignment mark (32). The method improves the accuracy, with which the modules can be aligned.</p> |