PATTERN-FORMING METHOD

摘要

Disclosed is a pattern-forming method which comprises a pattern-forming step wherein a solution that is obtained by dissolving a reactive substance, which is caused to chemically react by electromagnetic waves, ions or electrons, into an ionic liquid, is irradiated with electromagnetic waves, ions or electrons, so that a chemical reaction of the reactive substance is caused and the reaction product is deposited on the irradiated portion, thereby forming a pattern of the reaction product.  Consequently, a fine pattern can be formed by simple processes in the pattern-forming method.