| 摘要 |
<p>PURPOSE: An apparatus and a method for transferring a substrate are provided to prevent unnecessary contact between an arm unit and a wafer by inserting the arm unit which is inclined into a wafer cassette. CONSTITUTION: Arm units(2, 3) include substrate loading surfaces(2a, 3a) on which a substrate(W) is loaded. A support unit supports the arm units to be rotatable. The support unit includes a support plate(6a) which is expanded to a perpendicular direction with respect to the rotary shafts(A2, A3) of the arm units. The substrate loading surfaces rotate based on the rotary shafts. A suction tube is connected to the arm units.</p> |
