| 摘要 |
PURPOSE: A substrate inspecting apparatus is provided to improve the inspecting efficiency and the manufacturing rate of a flat display panel by automatically processing the inspection of a substrate while conveying. CONSTITUTION: A substrate inspecting apparatus comprises: a conveying stage(100) which transfers a substrate; a substrate inspection camera(110) which is installed in the upper part of the conveying stage and takes a photograph of the fixed region of the substrate; a review inspection section(120) which is installed in the upper part of the conveying stage; and a controller which controls the operation of the review testing station and the substrate inspection camera. The review inspection section divides and selects the fixed region of the substrate recorded in the substrate inspection camera and takes a photograph with a high definition camera than the substrate inspection camera.
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