| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce defects due to reverse side transfer in the manufacturing method of a display panel substrate. <P>SOLUTION: Forming a plurality of protrusions 11, 13 or a plurality of protrusions 11 on the substrate supporting surface of the chuck 10, the substrate 1 is supported by the plurality of protrusions 11, 13 or the plurality of protrusions 11. Further, forming suction holes 12 on the protrusions 11, the substrate 1 is vacuum chucked with the suction holes 12. The substrate 1 can be directly vacuum chucked with the suction holes 12 on the protrusions 11 without vacuumizing as before the space between the areas on the chuck 10 excepting the protrusions supporting the substrate and the substrate 1. Thus, the defects due to the reverse side transfer are reduced, since barriers are no more required as before to form vacuumed areas and the shapes of such barriers are not printed on the surface of the substrate 1. <P>COPYRIGHT: (C)2010,JPO&INPIT |
