| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a substrate supporting device which supports a brittle substrate and has a function of detecting a crack thereof. <P>SOLUTION: A sponge-made support member 604 has a surface shape of nearly the same size with a circuit board, and is provided with pins 638 at three places spaced apart from one another in a direction perpendicular to a conveyance direction thereof so that the pins can be elevated, and the pins are energized by springs 644 to be positioned at projection position projecting upward from a support plane including a support surface 612. When the circuit board 688 does not crack, a pin 638 comes into contact with the circuit board 688 as the support member 604 is elevated to retract to a retraction position of the support plane or below against energizing force of a spring 644, but if the circuit board 688 cracks, the pin stays at the projection position and a signal of a sensor 650 has no change, thereby determining that the circuit board 688 cracks. If the circuit board 688 cracks even after the pin retracts to the retraction position, the pin moves to the projection position and the cracking is detected from change of the signal of the sensor 650. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
