| 摘要 |
PROBLEM TO BE SOLVED: To provide a deposition method, capable of selectively heating a deposition material by using a powder deposition material mainly for instance and thus quickly and efficiently performing deposition processing. SOLUTION: The method of forming a thin film on the surface of a workpiece W includes: a depositing step for depositing the deposition material on the surface of the workpiece and forming a deposition material layer 70; and an irradiation step of forming the thin film 72A by irradiating the workpiece where the deposition material layer is formed with electromagnetic waves 74 and heating the deposition material layer. Thus, the deposition material is selectively heated by using the powder deposition material mainly for instance and the deposition processing is quickly and efficiently performed. COPYRIGHT: (C)2010,JPO&INPIT |
