ELECTRODE SYSTEM FOR LARGE BATCH PRODUCTION OF THIN PHOTOVOLTAIC MODULES

摘要

An electrode system for utilization in a plasma CVD reactor includes one or more RF electrodes and one or more counter-electrodes. At least one RF electrode has a contact edge and a cascading arrangement of slots with each slot having a longitudinal dimension substantially parallel to the contact edge. The RF electrodes are adapted to receive RF-power at a position adjacent to the contact edge. A plasma deposition system incorporating the electrode system set forth above is also provided.