LIGHTING DEVICE, EXPOSURE DEVICE, AND DEVICE MANUFACTURING METHOD

摘要

The lighting device is equipped with a light source unit that emits illuminating light from a light emitting part disposed at a first height relative to a reference plane; a first optical system that has a light incidence part which is disposed at a second height lower than the first height relative to the reference plane, and that illuminates an object with the illuminating light that enters the light incidence part; and a second optical system that has an optical axis which is tilted relative to the reference plane at a height between the first height and the second height and that guides the illuminating light emitted from the light emitting part to the light incidence part.