| 摘要 |
<p>There has been such a problem that in a pattern formed of a transparent film, a phenomenon wherein a contrast change varies depending on the area is generated and that a pattern which does not accord with a luminance change pattern cannot be measured. Provided is a line width measuring method which can perform measurement even in the case where the contrast change of the transparent film pattern is changed. A plurality of luminance change patterns are registered corresponding to contrast changes of the transparent film, measuring conditions which correspond to each of the registered luminance change patterns are set, and measurement is performed under the measuring conditions.</p> |
