METHOD FOR MANUFACTURING THIN FILM TYPE SOLAR CELL
摘要
<p>PURPOSE: A manufacturing method of a thin film type solar battery is provided to prevent the deterioration of the solar battery by reducing a silicon-hydrogen bonding site or a non-bonded site in an amorphous silicon. CONSTITUTION: A front electrode layer(200) is formed on a substrate(100). A P-type semiconductor layer(320) is formed on the front electrode layer. An I-type semiconductor layer(340) is formed on the p-type semiconductor layer. An N-type semiconductor layer(360) is formed on the I-type semiconductor layer. A transparent conductive layer(400) is formed on the N-type semiconductor layer. A rear electrode layer(500) is formed on the transparent conductive layer.</p>
