| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a substrate inspection apparatus capable of shortening an inspection processing time. Ž<P>SOLUTION: The substrate inspection apparatus 100 for inspecting a substrate 101 is provided with an XY stage 121 moving in a horizontal direction; a Z-θ stage 122 provided on the XY-stage 121 and moving in a vertical direction and a rotating direction; and a holding device 102 for holding the substrate 101 so that the height of an inspection surface of the substrate 101 may be arranged on a barycenter height position of the Z-θ stage 122. Ž<P>COPYRIGHT: (C)2007,JPO&INPIT Ž</p> |
