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发明名称
摘要
申请公布号
JP4479276(B2)
申请公布日期
2010.06.09
申请号
JP20040050279
申请日期
2004.02.25
申请人
发明人
分类号
H01L21/336;H01L29/786;H01L29/78
主分类号
H01L21/336
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代理人
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