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发明名称
摘要
申请公布号
JP4478645(B2)
申请公布日期
2010.06.09
申请号
JP20050357846
申请日期
2005.12.12
申请人
发明人
分类号
C23C14/24;H01L51/50;H05B33/10
主分类号
C23C14/24
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