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发明名称
RADIANT HEATING SOURCE
摘要
申请公布号
EP1593146(B1)
申请公布日期
2010.06.09
申请号
EP20040709941
申请日期
2004.02.10
申请人
AXCELIS TECHNOLOGIES, INC.
发明人
GARMER, CHRISTOPHER;KLEYNER, FELIKS;AYZMAN, ILYA;GOLDMAN, IGOR
分类号
H01L21/00
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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