MICROWAVE PLASMA GENERATING DEVICES AND PLASMA TORCHES
摘要
<p>The invention relates to a plasma generating device that comprises at least one very high frequency source (>100 MHz) connected via an impedance adaptation device to an elongated conductor attached on a dielectric substrate, at least one means for cooling said conductor, and at least one gas supply in the vicinity of the dielectric substrate on a side opposite to that bearing the conductor. The invention also relates to plasma torches using said device.</p>
申请公布号
EP2193694(A1)
申请公布日期
2010.06.09
申请号
EP20080837221
申请日期
2008.09.16
申请人
L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE