<p>A diagnostic system for a pressure sensor having a cavity configured to receive on applied pressure is provided. The cavity has a first and a second wall. A deflectable diaphragm is positioned in the cavity and configured to form a first and a second capacitance with the first wall and a third and a fourth capacitance with the second wall which change in response to the applied pressure. The capacitances form a first transfer function and a second transfer function. Changes in the first transfer function relative to the second transfer function are detected to provide a diagnostic output.</p>
申请公布号
EP1982156(B1)
申请公布日期
2010.06.09
申请号
EP20070762827
申请日期
2007.01.22
申请人
ROSEMOUNT, INC.
发明人
HARASYN, DONALD, E.;WILLCOX, CHARLES, R.;KLOSINSKI, ANDREW, J.