| 摘要 |
This vibrating mirror element (10) includes a pair of first beam portions (22, 23) supporting a mirror portion in a vibratile manner, a pair of second beam portions (24, 25) connected with the pair of first beam portions respectively, and a pair of driving portions (50, 60) connected with the pair of second beam portions respectively. The mirror portion is arranged in a region (R) surrounded by the pair of second beam portions and the pair of driving portions. The width (W1) of the pair of first beam portions and the width (W2) of the pair of second beam portions are rendered smaller than the width (W3) of the pair of driving portions.
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