| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide techniques to mount a large pellicle in a high-quality state by a simple work, and to provide a large pellicle for the techniques, a method for carrying a large pellicle, a pellicle case housing a large pellicle, and a transfer device for a large pellicle. Ž<P>SOLUTION: The large pellicle, having a pellicle film disposed on the upper face of a pellicle frame, has the lower face of the pellicle frame divided into at least two regions; and a first tacky adhesive face to finally adhere the pellicle frame to a photomask and a second tacky adhesive face protruding from the first tacky adhesive face and to temporarily fix the pellicle frame formed in the respective regions. Ž<P>COPYRIGHT: (C)2006,JPO&NCIPI Ž</p> |
