摘要 |
A conventional semiconductor device, for example, a MOS transistor including an offset gate structure has a problem that it is difficult to reduce the device size. In a semiconductor device according to the present invention, for example, in a P-channel MOS transistor including an offset gate structure, a LOCOS oxide film is formed between a source region and a drain region in an N type epitaxial layer. A gate electrode is formed to be positioned on the LOCOS oxide layer. In addition, a P type diffusion layer as the drain region and a P type diffusion layer as the source region are formed with a high positional accuracy with respect to the gate electrode. This structure makes it possible to reduce the device size of the MOS transistor.
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