发明名称 Capacitor structure in a semiconductor device
摘要 A semiconductor device comprises an integrated circuit formed on a substrate with a signal interface and at least one isolator capacitor. The integrated circuit comprises a plurality of interleaved inter-metal dielectric layers and interlayer dielectrics formed on the substrate, a thick passivation layer formed on the plurality of the interleaved inter-metal dielectric layers and interlayer dielectrics, and a thick metal layer formed on the thick passivation layer. The thick passivation layer has a thickness selected to be greater than the isolation thickness whereby testing for defects is eliminated. The one or more isolator capacitors comprise the thick metal layer and a metal layer in the plurality of interleaved inter-metal dielectric layers and interlayer dielectrics separated by the thick passivation layer as an insulator.
申请公布号 US7732889(B2) 申请公布日期 2010.06.08
申请号 US20070753524 申请日期 2007.05.24
申请人 AKROS SILICON INC. 发明人 CRAWLEY PHILIP JOHN;GHOSHAL SAJOL
分类号 H01L21/76 主分类号 H01L21/76
代理机构 代理人
主权项
地址