发明名称 Buffer coating having a physical mixture of high toughness polymer and a low shrinkage polymer
摘要 Embodiments of buffer coatings for semiconductor and integrated circuit manufacturing are presented herein, wherein the buffer coating is provided by mechanically blending a first polymer with at least a second polymer. The mechanically blended polymers producing a buffer coating that provides a barrier that is has an increased toughness and decreased shrinkage.
申请公布号 US7732936(B2) 申请公布日期 2010.06.08
申请号 US20060516288 申请日期 2006.09.06
申请人 INTEL CORPORATION 发明人 GOODNER MICHAEL D.;LEE KEVIN J.
分类号 H01L23/28;H01L23/29 主分类号 H01L23/28
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