| 摘要 |
PURPOSE: A substrate coating apparatus is provided to improve the reproducibility about the movement of one spraying nozzle by moving the spraying nozzle by selecting one of operational commands formed with the transition speed section of other spraying nozzles. CONSTITUTION: A substrate coating apparatus comprises the following: a spraying nozzle(300) supplying a coating solution to a substrate(10); an operation module(200) moving the spraying nozzle along to the substrate; a controlling module(400) electrically connected with the operation module for controlling the operation module; a chuck table(110) to settle the substrate; a guide rail(210) guiding the movement of the spraying nozzle while being installed on the side of the chuck table; and a movement motor(220) moving the spraying nozzle while being installed on the guide rail to slide. |
