发明名称 |
THE VACUUM ISOLATION SLOT VALVE AND VACUUM ISOLATION DOOR HAVING THE SAME |
摘要 |
<p>PURPOSE: A vacuum blocking slot valve inlet and a vacuum blocking door including the same are provided to prevent a damage of an operating part by opening-closing a housing entrance by the entrance open and close panel with interlocking an elevation action of the elevation apparatus. CONSTITUTION: A housing(10) forms an entrance of a pair with falling each other. An elevation apparatus(20) is located between a pair of the entrances. An entrance opening and closing part(30) opens and closes a pair of the entrances. The entrance opening and closing part includes an elevation panel and an entrance opening and closing apparatus(33). The elevation panel is connected with a piston of the elevation apparatus. Both sides of the elevation panel are respectively connected to a first entrance opening and closing panel and a second entrance opening and closing panel.</p> |
申请公布号 |
KR20100061214(A) |
申请公布日期 |
2010.06.07 |
申请号 |
KR20080120123 |
申请日期 |
2008.11.28 |
申请人 |
LTL.,CO., LTD. |
发明人 |
PARK, YOUNG NAM;KO, DAE WOON |
分类号 |
H01L21/677;G02F1/13;H01L21/02 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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