发明名称 THE VACUUM ISOLATION SLOT VALVE AND VACUUM ISOLATION DOOR HAVING THE SAME
摘要 <p>PURPOSE: A vacuum blocking slot valve inlet and a vacuum blocking door including the same are provided to prevent a damage of an operating part by opening-closing a housing entrance by the entrance open and close panel with interlocking an elevation action of the elevation apparatus. CONSTITUTION: A housing(10) forms an entrance of a pair with falling each other. An elevation apparatus(20) is located between a pair of the entrances. An entrance opening and closing part(30) opens and closes a pair of the entrances. The entrance opening and closing part includes an elevation panel and an entrance opening and closing apparatus(33). The elevation panel is connected with a piston of the elevation apparatus. Both sides of the elevation panel are respectively connected to a first entrance opening and closing panel and a second entrance opening and closing panel.</p>
申请公布号 KR20100061214(A) 申请公布日期 2010.06.07
申请号 KR20080120123 申请日期 2008.11.28
申请人 LTL.,CO., LTD. 发明人 PARK, YOUNG NAM;KO, DAE WOON
分类号 H01L21/677;G02F1/13;H01L21/02 主分类号 H01L21/677
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