| 摘要 |
PURPOSE: An apparatus for changing the direction of transferring a substrate and the substrate including the same are provided to stop the operation of a substrate driving unit by detecting an object between a base and the bottom of a chamber. CONSTITUTION: A base(323) supports a substrate. A supporting shaft(325) supports the base. A substrate driving unit(330) rotates the base. A controller controls the operation of the substrate driving unit. A photosensor detects an object between the base and the bottom of the chamber. The photosensor comprises a transmission unit and a receiver(342b).
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