Dense spinel conducting film, preparation method therof and metal interconnect using the same

摘要

PURPOSE: A dense spinel conductive film is provided to maintain electric conductivity of 20 mΩ/cm^2 or less during thermal process at a high temperature for a long time and to prepare a conductive substrate with excellent stability. CONSTITUTION: A dense spinel conductive film has MnxCo3-xO4(1<=x<=2). The thin film is 1-50 micron. A method for preparing the spinel conductive film comprises the steps of: milling, mixing, and calcining raw material powder to prepare conductive oxides; re-milling the conductive oxide to prepare conductive oxide powder; and depositing the conductive oxide powder on the metal substrate to form a thin film.