| 摘要 |
PURPOSE: A penetrating apparatus, a penetrating method, a semiconductor manufacturing apparatus, a susceptor using the same, and a computer-readable memory medium are provided to create a reaction product on a substrate by implementing a cycle with providing 2 kinds of a reaction gas with reacting each other on the substrate. CONSTITUTION: A substrate transferring arm(10) includes a hooking unit(10a). A susceptor(2) is installed within a container with rotating possibly. A first reaction providing unit provides the first reaction gas on the one side. A second reaction providing unit provides the second reaction gas on the one side. A separating area separated a first processing area and a second processing area(P2). Exhaust pipes(61, 62) exhaust inside of the container.
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