EQUIPMENT FOR MANUFACTURING DISPLAY HAVING PRESSURE LEAK MONITORING UNIT

摘要

PURPOSE: Equipment for manufacturing a display having pressure leak monitoring unit is provided to generate an alarm by monitoring a pressure leakage due to a slit valve connection a process chamber and a transfer chamber in real time. CONSTITUTION: A processing chamber(100) comprises slits which are communicated with the outside while processing the substrate. A plurality of transfer chambers(300) are arranged around the processing chamber to be communicated with the slits of the processing chamber. The slit valve is arranged around the slit and opens/closes the slit by receiving an electrical signal from outside. A monitoring unit monitors the pressure leakage between the slit valve and the slit.