发明名称 SEMICONDUCTOR DEVICE HAVING BACKSIDE REDISTRIBUTION LAYERS AND METHOD FOR FABRICATING THE SAME
摘要 Present embodiments relate to a semiconductor device having a backside redistribution layer and a method for forming such a layer. Specifically, one embodiment includes providing a substrate comprising a via (54) formed therein. The substrate has a front side and a backside. The embodiment may further include forming a trench on the backside of the substrate, disposing an insulating material (110) in the trench, and forming a trace (130) over the insulating material in the trench.
申请公布号 KR20100061456(A) 申请公布日期 2010.06.07
申请号 KR20107004472 申请日期 2008.06.30
申请人 MICRON TECHNOLOGY, INC. 发明人 OLIVER STEVE;FARNWORTH WARREN
分类号 H01L21/768 主分类号 H01L21/768
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