| 摘要 |
<p>PURPOSE: An apparatus for sensing a substrate is provided to return a rotation unit to an original location using a magnetic force or an elastic force in a substrate unloading process. CONSTITUTION: A sensor(220) is fixed to one side of a body(210). A substrate contacting part contacting with one side of a substrate(S) is located on one side of a rotating unit(230). A sensing part is located on the other side of the rotating unit. The rotating unit rotates about the body to a horizontal direction. A returning unit returns the rotating unit to the original location. The returning unit is a magnet(232) included in the body and the rotating unit respectively.</p> |
