| 摘要 |
PURPOSE: A flat panel inspection apparatus and method are provided to accurately evaluate the bending degree of a flat panel without distortion of an optical system and thereby detect a failure of flat panels in the early stage of manufacture. CONSTITUTION: A flat panel inspection apparatus comprises a light source(410), a flat panel screen(420), a photographing unit(430), and a determination unit(440). The light source is located in the upper and side position of a plane including the surface of an inspection object(400) and projects inspection pattern light to the inspection object. The flat panel screen is installed in the position opposite the light source with respect to the inspection object so that the inspection pattern light reflected off the inspection object is focused thereon. The photographing unit is installed opposite to the flat panel screen and outputs an inspection image by taking the inspection image focused on the flat panel screen. The determination unit evaluates the bending degree of the inspection object based on the inspection image.
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