METHODS FOR NEUTRALIZATION OF ELECTRON BEAM CHARGE IRRADIATED FROM AN ELECTRON BEAM SOURCE

摘要

PURPOSE: A neutralization method of an electron beam electric charge which is radiated from electron beam source is provided to efficiently transfer the energy of electron beam to a non-conductor or semiconductor substrate by neutralizing the electric charge of the electron beam in order to remove a negative charge which is accumulated on the non-conductor or semiconductor substrate. CONSTITUTION: Electron beam is radiated on the surface of a substrate(100) using electron beam source(110). Ion beam is radiated on the surface of the substrate using an ion beam irradiation apparatus(120). An electric charge which is accumulated on the surface of the substrate is neutralized. The substrate is made of a non-conductor or semiconductor substrate.