APPARATUS AND METHOD FOR TRANSFERING SUBSTRATE

摘要

PURPOSE: An apparatus and a method for transferring a substrate are provided to minimize an operational failure due to particles which are absorbed on a substrate by injecting ions in order to remove electrostatic electricity. CONSTITUTION: A robot arm(220) comprises an arm blade(210) onto which a substrate is loaded. An ion generator(820) injects ions onto the substrate in order to remove electrostatic electricity which is charged in the substrate. The ion generator is arranged on the upper side of the arm blade. A bracket(812) is arranged on the upper side of the arm blade. A support stand supports the bracket.