摘要 |
PURPOSE: A drive transmission unit and a substrate transport apparatus including the same are provided to prevent the displacement or distortion of a transfer shaft by reducing the length of the shaft. CONSTITUTION: A drive transmission unit comprises a first magnetic roller(310), a second magnetic roller(320), and a driving unit(330). First magnetic strips(312) are formed on the circumferential surface of the first magnetic roller. The second magnetic roller is located under the first magnetic roller with second magnetic strips(322) formed on the circumferential surface thereof which surrounds the central portion facing the first magnetic roller. The driving unit is connected the central portion of the second magnetic roller and rotates the second magnetic roller in order to transmit the magnetic force caused by the rotation of the second magnetic roller to the first magnetic roller.
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